Aperture Stop Mechanisms for Microchip Production Lines
The complex structures of integrated circuits require the highest precision in the production process. High resolution optical systems are used to print the mask on to the semi-conductor substrate. Comparable to conventional camera systems, an aperture stop is used to optimise the optical system's aperture size in all cases. This aperture stop mechanism is the RUAG Space contribution to the new lithographic systems used in the chip production.
High vacuum and surface cleanliness are familiar requirements in the space environment. It is no coincidence that the semiconductor industry has entrusted RUAG Space with the development and production of these new demanding mechanisms systems.